GENMARK AXUS 9500S0107A ROBOT, DUAL-ARM, 200/300MM WAFER SIZE, MULTI-AXIS

THE GENMARK AXUS 9500S0107A IS A DUAL-ARM ATMOSPHERIC WAFER HANDLING ROBOT. IT IS ENGINEERED FOR PRECISE, HIGH-SPEED TRANSFER OF SEMICONDUCTOR WAFERS. THIS SYSTEM TYPICALLY SUPPORTS WAFER SIZES OF BOTH 200MM AND 300MM, ACCOMMODATING COMMON INDUSTRY STANDARDS. THE ROBOT INTEGRATES MULTI-AXIS MOTION CONTROL, PROVIDING RADIAL, ROTATIONAL, AND VERTICAL MOVEMENT FOR EACH ARM TO FACILITATE ACCURATE AND REPEATABLE WAFER PLACEMENT WITHIN A PROCESS ENVIRONMENT. DESIGNED FOR AUTOMATED OPERATION, IT ENSURES DELICATE HANDLING WITH HIGH POSITIONAL REPEATABILITY, CRUCIAL FOR SEMICONDUCTOR MANUFACTURING PROCESSES.